The Department of Electrical and Computer Engineering at BYU offers students and vistors a virtual glimpse into their Class 10 Cleanroom. The cleanroom has equipment capable of Lithography, Film Deposition and Growth, Annealing and Diffusion, Metrology Etching, Baking/Curing, and Polishing/Grinding/Cleaving.
Class 10 Clean Room Classification Chart
| Class | maximum particles/ft³ | ISO equivalent | ||||
|---|---|---|---|---|---|---|
| ≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5 µm | ≥5 µm | ||
| 1 | 35 | 7.5 | 3 | 1 | 0.007 | ISO 3 |
| 10 | 350 | 75 | 30 | 10 | 0.07 | ISO 4 |
| 100 | 3,500 | 750 | 300 | 100 | 0.7 | ISO 5 |
| 1,000 | 35,000 | 7,500 | 3000 | 1,000 | 7 | ISO 6 |
| 10,000 | 350,000 | 75,000 | 30,000 | 10,000 | 70 | ISO 7 |
| 100,000 | 3.5×106 | 750,000 | 300,000 | 100,000 | 700 | ISO 8 |
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